10th Symposium on 3D laser, ion, electron beam lithography, and direct-write technology
As fabrication challenges become more complex, integrating micro- and nanoscale processes into hybrid manufacturing chains is becoming increasingly crucial. The 2026 Nano-Micro-Lithography Symposium (NMLS) highlights how such integrated approaches expand the capabilities of nano- and microfabrication and enable novel combinations of materials.
NMLS 2026 will take place as an in-person event at DTU Nanolab in Kongens Lyngby, Denmark – one of Europe’s leading research facilities for micro- and nanofabrication. This unique setting offers a hands-on experience to explore various lithography systems in a real laboratory environment.
The event brings together technical experts, researchers, and users from Nanoscribe, Heidelberg Instruments, GenISys and micro resist technology. The symposium serves as a vibrant meeting point for professionals in nano- and microfabrication to exchange ideas, discuss current developments, and explore future opportunities in the field.